JPH0459942U - - Google Patents
Info
- Publication number
- JPH0459942U JPH0459942U JP10273190U JP10273190U JPH0459942U JP H0459942 U JPH0459942 U JP H0459942U JP 10273190 U JP10273190 U JP 10273190U JP 10273190 U JP10273190 U JP 10273190U JP H0459942 U JPH0459942 U JP H0459942U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- probe
- substrate
- vacuum chamber
- electrical characteristics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 8
- 239000000523 sample Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 4
- 229910001338 liquidmetal Inorganic materials 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10273190U JPH0459942U (en]) | 1990-09-28 | 1990-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10273190U JPH0459942U (en]) | 1990-09-28 | 1990-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0459942U true JPH0459942U (en]) | 1992-05-22 |
Family
ID=31847229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10273190U Pending JPH0459942U (en]) | 1990-09-28 | 1990-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0459942U (en]) |
-
1990
- 1990-09-28 JP JP10273190U patent/JPH0459942U/ja active Pending
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